Inventor
KLUMPP ARMIN
DE9 patents
⚠️ This page may combine multiple inventors who share the name “KLUMPP ARMIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
FRAUNHOFER GES FORSCHUNG
7 patentsUS6548391B1Apr 15, 2003
Method of vertically integrating electric components by means of back contacting
FRAUNHOFER GES FORSCHUNG86 citations97
US6756288B1Jun 29, 2004
Method of subdividing a wafer
FRAUNHOFER GES FORSCHUNG33 citations91
US7027283B2Apr 11, 2006
Mobile holder for a wafer
FRAUNHOFER GES FORSCHUNG14 citations78
US5506008AApr 9, 1996
Method of applying a lacquer film sensitive to ultraviolet and/or electron radiation
FRAUNHOFER GES FORSCHUNG17 citations73
US12166073B2Dec 10, 2024
Vertical semiconductor diode or transistor device having at least one compound semiconductor and a three-dimensional electronic semiconductor device comprising at least one vertical compound structure
FRAUNHOFER GES FORSCHUNG0 citations62
US11610967B2Mar 21, 2023
Vertical compound semiconductor structure and method for producing the same
FRAUNHOFER GES FORSCHUNG0 citations62
US5262358ANov 16, 1993
Method for producing a silicate layer in an integrated circuit
FRAUNHOFER GES FORSCHUNG6 citations57