P

Inventor

WEBER ULRICH

DE53 patents
⚠️ This page may combine multiple inventors who share the name “WEBER ULRICH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ZEISS CARL SMT GMBH

16 patents
US8035903B2Oct 11, 2011

Positioning unit and alignment device for an optical element

ZEISS CARL SMT GMBH9 citations92
US8760777B2Jun 24, 2014

Positioning unit and apparatus for adjustment of an optical element

ZEISS CARL SMT GMBH4 citations84
US9075174B2Jul 7, 2015

Positioning unit and apparatus for adjustment of an optical element

ZEISS CARL SMT GMBH3 citations74
US8493674B2Jul 23, 2013

Positioning unit and alignment device for an optical element

ZEISS CARL SMT GMBH3 citations74
US7961294B2Jun 14, 2011

Imaging device in a projection exposure facility

ZEISS CARL SMT GMBH6 citations72
US9843153B2Dec 12, 2017

Beam reverser module and optical power amplifier having such a beam reverser module

ZEISS CARL SMT GMBH2 citations70
US9664873B2May 30, 2017

Positioning unit and apparatus for adjustment of an optical element

ZEISS CARL SMT GMBH1 citations63
US8027024B2Sep 27, 2011

Replacement device for an optical element

ZEISS CARL SMT GMBH3 citations63
US10215948B2Feb 26, 2019

Optical element module with minimized parasitic loads

ZEISS CARL SMT GMBH1 citations62
US10133021B2Nov 20, 2018

Positioning unit and apparatus for adjustment of an optical element

ZEISS CARL SMT GMBH0 citations52
US9766550B2Sep 19, 2017

Actuators and microlithography projection exposure systems and methods using the same

ZEISS CARL SMT GMBH0 citations52
US8659745B2Feb 25, 2014

Optical system with an exchangeable, manipulable correction arrangement for reducing image aberrations

ZEISS CARL SMT GMBH1 citations52
US8351139B2Jan 8, 2013

Optical element module with minimized parasitic loads

ZEISS CARL SMT GMBH1 citations52
US10969699B2Apr 6, 2021

Projection lighting system for semiconductor lithography with an improved heat transfer

ZEISS CARL SMT GMBH0 citations51
US10777958B2Sep 15, 2020

Beam reverser module and optical power amplifier having such a beam reverser module

ZEISS CARL SMT GMBH0 citations50
US9709895B2Jul 18, 2017

Support elements for an optical element

ZEISS CARL SMT GMBH0 citations48

ZEISS CARL SMT AG

15 patents
US7738193B2Jun 15, 2010

Positioning unit and alignment device for an optical element

ZEISS CARL SMT AG11 citations92
US7304717B2Dec 4, 2007

Imaging device in a projection exposure facility

ZEISS CARL SMT AG12 citations91
US7242537B2Jul 10, 2007

Holding and positioning apparatus for an optical element

ZEISS CARL SMT AG15 citations84
US7760327B2Jul 20, 2010

Reflecting optical element with eccentric optical passageway

ZEISS CARL SMT AG8 citations82
US7486382B2Feb 3, 2009

Imaging device in a projection exposure machine

ZEISS CARL SMT AG8 citations82
US6724548B2Apr 20, 2004

Objective, in particular a projection lens for microlithography

ZEISS CARL SMT AG8 citations74
US7710542B2May 4, 2010

Imaging device in a projection exposure machine

ZEISS CARL SMT AG7 citations72
US7079331B2Jul 18, 2006

Device for holding a beam splitter element

ZEISS CARL SMT AG7 citations71
US6967792B2Nov 22, 2005

Apparatus for positioning an optical element in a structure

ZEISS CARL SMT AG11 citations71
US7515359B2Apr 7, 2009

Support device for positioning an optical element

ZEISS CARL SMT AG7 citations68
US7239462B2Jul 3, 2007

Objective with at least one optical element

ZEISS CARL SMT AG6 citations62
US6842294B2Jan 11, 2005

Catadioptric objective

ZEISS CARL SMT AG5 citations62
US7564636B2Jul 21, 2009

Device for preventing the displacement of an optical element

ZEISS CARL SMT AG5 citations60
US7251086B2Jul 31, 2007

Apparatus for positioning an optical element in a structure

ZEISS CARL SMT AG2 citations60
US7986472B2Jul 26, 2011

Optical element module

ZEISS CARL SMT AG1 citations51

SCHWERIONENFORSCH GMBH

3 patents

WEBER ULRICH

3 patents

DURAVIT AG

3 patents

HOESCH AG

2 patents

ZEISS STIFTUNG

1 patent

BAYER AG

1 patent

GSI HELMHOLTZZENTRUM SCHWERIONENFORSCHUNG GMBH

1 patent

KUGLER JENS

1 patent

HOESCH AKTIENGESSELSCHAFT

1 patent

ZEISS CARL SEMICONDUCTOR MFG

1 patent

HUMMEL WOLFGANG

1 patent

LIMBACH GUIDO

1 patent

Showing the top 50 of 53 patents by PatentIndex Score.