Inventor
WEBER ULRICH
DE53 patents
⚠️ This page may combine multiple inventors who share the name “WEBER ULRICH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ZEISS CARL SMT GMBH
16 patentsUS8035903B2Oct 11, 2011
Positioning unit and alignment device for an optical element
ZEISS CARL SMT GMBH9 citations92
US8760777B2Jun 24, 2014
Positioning unit and apparatus for adjustment of an optical element
ZEISS CARL SMT GMBH4 citations84
US9075174B2Jul 7, 2015
Positioning unit and apparatus for adjustment of an optical element
ZEISS CARL SMT GMBH3 citations74
US8493674B2Jul 23, 2013
Positioning unit and alignment device for an optical element
ZEISS CARL SMT GMBH3 citations74
US7961294B2Jun 14, 2011
Imaging device in a projection exposure facility
ZEISS CARL SMT GMBH6 citations72
US9843153B2Dec 12, 2017
Beam reverser module and optical power amplifier having such a beam reverser module
ZEISS CARL SMT GMBH2 citations70
US9664873B2May 30, 2017
Positioning unit and apparatus for adjustment of an optical element
ZEISS CARL SMT GMBH1 citations63
US8027024B2Sep 27, 2011
Replacement device for an optical element
ZEISS CARL SMT GMBH3 citations63
US10215948B2Feb 26, 2019
Optical element module with minimized parasitic loads
ZEISS CARL SMT GMBH1 citations62
US10133021B2Nov 20, 2018
Positioning unit and apparatus for adjustment of an optical element
ZEISS CARL SMT GMBH0 citations52
US9766550B2Sep 19, 2017
Actuators and microlithography projection exposure systems and methods using the same
ZEISS CARL SMT GMBH0 citations52
US8659745B2Feb 25, 2014
Optical system with an exchangeable, manipulable correction arrangement for reducing image aberrations
ZEISS CARL SMT GMBH1 citations52
US8351139B2Jan 8, 2013
Optical element module with minimized parasitic loads
ZEISS CARL SMT GMBH1 citations52
US10969699B2Apr 6, 2021
Projection lighting system for semiconductor lithography with an improved heat transfer
ZEISS CARL SMT GMBH0 citations51
US10777958B2Sep 15, 2020
Beam reverser module and optical power amplifier having such a beam reverser module
ZEISS CARL SMT GMBH0 citations50
US9709895B2Jul 18, 2017
Support elements for an optical element
ZEISS CARL SMT GMBH0 citations48
ZEISS CARL SMT AG
15 patentsUS7738193B2Jun 15, 2010
Positioning unit and alignment device for an optical element
ZEISS CARL SMT AG11 citations92
US7304717B2Dec 4, 2007
Imaging device in a projection exposure facility
ZEISS CARL SMT AG12 citations91
US7242537B2Jul 10, 2007
Holding and positioning apparatus for an optical element
ZEISS CARL SMT AG15 citations84
US7760327B2Jul 20, 2010
Reflecting optical element with eccentric optical passageway
ZEISS CARL SMT AG8 citations82
US7486382B2Feb 3, 2009
Imaging device in a projection exposure machine
ZEISS CARL SMT AG8 citations82
US6724548B2Apr 20, 2004
Objective, in particular a projection lens for microlithography
ZEISS CARL SMT AG8 citations74
US7710542B2May 4, 2010
Imaging device in a projection exposure machine
ZEISS CARL SMT AG7 citations72
US7079331B2Jul 18, 2006
Device for holding a beam splitter element
ZEISS CARL SMT AG7 citations71
US6967792B2Nov 22, 2005
Apparatus for positioning an optical element in a structure
ZEISS CARL SMT AG11 citations71
US7515359B2Apr 7, 2009
Support device for positioning an optical element
ZEISS CARL SMT AG7 citations68
US7239462B2Jul 3, 2007
Objective with at least one optical element
ZEISS CARL SMT AG6 citations62
US6842294B2Jan 11, 2005
Catadioptric objective
ZEISS CARL SMT AG5 citations62
US7564636B2Jul 21, 2009
Device for preventing the displacement of an optical element
ZEISS CARL SMT AG5 citations60
US7251086B2Jul 31, 2007
Apparatus for positioning an optical element in a structure
ZEISS CARL SMT AG2 citations60
US7986472B2Jul 26, 2011
Optical element module
ZEISS CARL SMT AG1 citations51
SCHWERIONENFORSCH GMBH
3 patentsUS6891177B1May 10, 2005
Ion beam scanner system and operating method
SCHWERIONENFORSCH GMBH278 citations98
US6710362B2Mar 23, 2004
Device for irradiating a tumor tissue
SCHWERIONENFORSCH GMBH255 citations98
US6683318B1Jan 27, 2004
Ion beam therapy system and a method for operating the system
SCHWERIONENFORSCH GMBH354 citations95
WEBER ULRICH
3 patentsDURAVIT AG
3 patentsHOESCH AG
2 patentsZEISS STIFTUNG
1 patentBAYER AG
1 patentGSI HELMHOLTZZENTRUM SCHWERIONENFORSCHUNG GMBH
1 patentKUGLER JENS
1 patentHOESCH AKTIENGESSELSCHAFT
1 patentZEISS CARL SEMICONDUCTOR MFG
1 patentHUMMEL WOLFGANG
1 patentLIMBACH GUIDO
1 patentShowing the top 50 of 53 patents by PatentIndex Score.