Inventor
KWAN MICHAEL CHIU
US7 patents
Patents
7 patentsUS7253123B2Aug 7, 2007
Method for producing gate stack sidewall spacers
APPLIED MATERIALS INC253 citations98
US7638440B2Dec 29, 2009
Method of depositing an amorphous carbon film for etch hardmask application
APPLIED MATERIALS INC27 citations90
US7407893B2Aug 5, 2008
Liquid precursors for the CVD deposition of amorphous carbon films
APPLIED MATERIALS INC33 citations90
US6812153B2Nov 2, 2004
Method for high aspect ratio HDP CVD gapfill
APPLIED MATERIALS INC13 citations83
US6596123B1Jul 22, 2003
Method and apparatus for cleaning a semiconductor wafer processing system
APPLIED MATERIALS INC15 citations82
US6715496B2Apr 6, 2004
Method and apparatus for cleaning a semiconductor wafer processing system
APPLIED MATERIALS INC10 citations71
US7064077B2Jun 20, 2006
Method for high aspect ratio HDP CVD gapfill
APPLIED MATERIALS INC2 citations61