P
PatentIndex
Search
Landscape
Sign in
Inventor
HAMILA JALEL
US
2 patents
Patents
2 patents
US6596123B1
Jul 22, 2003
Method and apparatus for cleaning a semiconductor wafer processing system
APPLIED MATERIALS INC
15 citations
82
US6715496B2
Apr 6, 2004
Method and apparatus for cleaning a semiconductor wafer processing system
APPLIED MATERIALS INC
10 citations
71