Inventor
LIN TSAI-SEN
TW5 patents
Patents
5 patentsUS6727189B2Apr 27, 2004
Method for detecting metal contamination on a silicon chip by implanting arsenic
MOSEL VITELIC INC2 citations57
US6492188B1Dec 10, 2002
Monitor method for quality of metal ARC (antireflection coating) layer
MOSEL VITELIC INC2 citations54
US6245608B1Jun 12, 2001
Ion implantation process for forming contact regions in semiconductor materials
MOSEL VITELIC INC1 citations49
US6677216B2Jan 13, 2004
Method of making IC capacitor
MOSEL VITELIC INC1 citations44
US6812148B2Nov 2, 2004
Preventing gate oxice thinning effect in a recess LOCOS process
MOSEL VITELIC INC0 citations43