P

Inventor

MURAKAMI TAKESHI

JP238 patents
⚠️ This page may combine multiple inventors who share the name “MURAKAMI TAKESHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

EBARA CORP

24 patents
US7138629B2Nov 21, 2006

Testing apparatus using charged particles and device manufacturing method using the testing apparatus

EBARA CORP151 citations99
US6855929B2Feb 15, 2005

Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former

EBARA CORP106 citations99
US6593152B2Jul 15, 2003

Electron beam apparatus and method of manufacturing semiconductor device using the apparatus

EBARA CORP109 citations99
US6282368B1Aug 28, 2001

Liquid feed vaporization system and gas injection device

EBARA CORP104 citations99
US6132512AOct 17, 2000

Vapor-phase film growth apparatus and gas ejection head

EBARA CORP225 citations99
US5951923ASep 14, 1999

Vaporizer apparatus and film deposition apparatus therewith

EBARA CORP275 citations99
US5728223AMar 17, 1998

Reactant gas ejector head and thin-film vapor deposition apparatus

EBARA CORP674 citations99
US9368314B2Jun 14, 2016

Inspection system by charged particle beam and method of manufacturing devices using the system

EBARA CORP38 citations98
US7420164B2Sep 2, 2008

Objective lens, electron beam system and method of inspecting defect

EBARA CORP68 citations98
US6176929B1Jan 23, 2001

Thin-film deposition apparatus

EBARA CORP340 citations98
US5935337AAug 10, 1999

Thin-film vapor deposition apparatus

EBARA CORP90 citations97
US7741601B2Jun 22, 2010

Testing apparatus using charged particles and device manufacturing method using the testing apparatus

EBARA CORP36 citations96
US7365324B2Apr 29, 2008

Testing apparatus using charged particles and device manufacturing method using the testing apparatus

EBARA CORP49 citations96
US7223973B2May 29, 2007

Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former

EBARA CORP38 citations96
US6195504B1Feb 27, 2001

Liquid feed vaporization system and gas injection device

EBARA CORP58 citations96
US6036783AMar 14, 2000

Liquid material vaporizer apparatus and gas ejection device

EBARA CORP63 citations96
US5549874AAug 27, 1996

Discharge reactor

EBARA CORP59 citations95
US8053726B2Nov 8, 2011

Inspection system by charged particle beam and method of manufacturing devices using the system

EBARA CORP11 citations93
US7928378B2Apr 19, 2011

Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former

EBARA CORP17 citations93
US7569838B2Aug 4, 2009

Electron beam inspection system and inspection method and method of manufacturing devices using the system

EBARA CORP23 citations93
US7411191B2Aug 12, 2008

Inspection system by charged particle beam and method of manufacturing devices using the system

EBARA CORP20 citations93
US7408175B2Aug 5, 2008

Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former

EBARA CORP19 citations93
US7385197B2Jun 10, 2008

Electron beam apparatus and a device manufacturing method using the same apparatus

EBARA CORP30 citations93
US7351969B2Apr 1, 2008

Electron beam inspection system and inspection method and method of manufacturing devices using the system

EBARA CORP37 citations93

CANON KK

7 patents

FUJIFILM CORP

4 patents

OGK KABUTO CO LTD

3 patents

TOSHIBA KK

2 patents

KOTOBUKI PHARMACEUTICAL CO LTD

2 patents

MITSUBOSHI BELTING LTD

2 patents

O G K HANBAI CO LTD

1 patent

ASTELLAS PHARMA INC

1 patent

MEIJI SEIKA KAISHA

1 patent

SHARP KK

1 patent

O G K HANBAI

1 patent

HATAKEYAMA MASAHIRO

1 patent

Showing the top 50 of 238 patents by PatentIndex Score.