Inventor
NAKANO MICHIO
JP6 patents
⚠️ This page may combine multiple inventors who share the name “NAKANO MICHIO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI HIGH TECH CORP
4 patentsUS8036447B2Oct 11, 2011
Inspection apparatus for inspecting patterns of a substrate
HITACHI HIGH TECH CORP10 citations82
US9188554B2Nov 17, 2015
Pattern inspection device and pattern inspection method
HITACHI HIGH TECH CORP6 citations72
US7421110B2Sep 2, 2008
Image processing unit for wafer inspection tool
HITACHI HIGH TECH CORP6 citations71
US7889911B2Feb 15, 2011
Image processing unit for wafer inspection tool
HITACHI HIGH TECH CORP1 citations49