Inventor

LEE MUHYEON

KR4 patents

Patents

4 patents

US11765793B2Sep 19, 2023

Substrate treating apparatus

SEMES CO LTD2 citations66

US10211075B2Feb 19, 2019

Apparatus and method for treating a substrate

SEMES CO LTD1 citations56

US12354889B2Jul 8, 2025

Apparatus for processing a substrate and method of processing a substrate

SEMES CO LTD0 citations52

US12198950B2Jan 14, 2025

Apparatus and method for processing substrate

SEMES CO LTD0 citations46