Inventor

FANG JEN-YU

TW2 patents

Patents

2 patents

US9869940B2Jan 16, 2018

Metrology method and apparatus, computer program and lithographic system

ASML NETHERLANDS BV3 citations68

US10261427B2Apr 16, 2019

Metrology method and apparatus, computer program and lithographic system

ASML NETHERLANDS BV1 citations58