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Inventor
JANG CHIOU-HUNG
US
2 patents
⚠️ This page may combine multiple inventors who share the name “JANG CHIOU-HUNG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
INTEL CORP
1 patent
US7569310B2
Aug 4, 2009
Sub-resolution assist features for photolithography with trim ends
INTEL CORP
168 citations
95
ASML NETHERLANDS BV
1 patent
US10459345B2
Oct 29, 2019
Focus-dose co-optimization based on overlapping process window
ASML NETHERLANDS BV
0 citations
34