Inventor
BROM PAUL PETER ANNA ANTONIUS
NL6 patents
Patents
6 patentsUS7868304B2Jan 11, 2011
Method for removal of deposition on an optical element, lithographic apparatus, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV17 citations83
US7612353B2Nov 3, 2009
Lithographic apparatus, contaminant trap, and device manufacturing method
ASML NETHERLANDS BV8 citations79
US7696492B2Apr 13, 2010
Radiation system and lithographic apparatus
ASML NETHERLANDS BV6 citations61
US7602472B2Oct 13, 2009
Contamination prevention system, lithographic apparatus, radiation source, and method for manufacturing a device
ASML NETHERLANDS BV2 citations61
US10990015B2Apr 27, 2021
Debris mitigation system, radiation source and lithographic apparatus
ASML NETHERLANDS BV0 citations60
US11421729B2Aug 23, 2022
Elastic guiding device, positioning device, blade and lithographic apparatus
ASML NETHERLANDS BV0 citations42