Inventor
NISHIKORI Katsuaki
JP10 patents
Patents
10 patentsUS10824073B2Nov 3, 2020
Radiation-sensitive resin composition and resist pattern-forming method
JSR CORP3 citations71
US11592746B2Feb 28, 2023
Radiation-sensitive resin composition, resist pattern-forming method, compound and method of generating acid
JSR CORP4 citations70
US11281100B2Mar 22, 2022
Radiation-sensitive resin composition, onium salt compound and method for forming resist pattern
JSR CORP2 citations70
US11609495B2Mar 21, 2023
Radiation-sensitive resin composition and resist pattern-forming method
JSR CORP3 citations69
US11320735B2May 3, 2022
Radiation-sensitive resin composition, resist pattern-forming method, acid diffusion control agent, carboxylic acid salt and carboxylic acid
JSR CORP1 citations61
US12560866B2Feb 24, 2026
Radiation-sensitive resin composition, method of forming resist pattern, polymer, and compound
JSR CORP0 citations59
US12259653B2Mar 25, 2025
Radiation-sensitive resin composition, method of forming resist pattern, and compound
JSR CORP0 citations59
US12372869B2Jul 29, 2025
Method for forming resist pattern and radiation-sensitive resin composition
JSR CORP0 citations58
US12092957B2Sep 17, 2024
Radiation-sensitive resin composition, method for forming resist pattern and compound
JSR CORP0 citations48
US11966161B2Apr 23, 2024
Radiation-sensitive resin composition, method of forming resist pattern, and compound
JSR CORP0 citations48