Inventor
CHOI MOON SOON
KR5 patents
Patents
5 patentsUS12272544B2Apr 8, 2025
Apparatus for treating substrate and method for treating substrate
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Dissolved ozone removal unit, substrate treating apparatus including the same, and substrate treating method
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Chemical liquid providing unit and substrate treating apparatus including the same
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US12266546B2Apr 1, 2025
Unit for supplying liquid, apparatus and method for treating substrate with the unit
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