Inventor
HABEGGER MILLARD A
US7 patents
⚠️ This page may combine multiple inventors who share the name “HABEGGER MILLARD A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
4 patentsUS4147435AApr 3, 1979
Interferometric process and apparatus for the measurement of the etch rate of opaque surfaces
IBM56 citations94
US4056730ANov 1, 1977
Apparatus for detecting registration marks on a target such as a semiconductor wafer
IBM8 citations70
US4899327AFeb 6, 1990
Focus servo loop correction
IBM16 citations69
US4275960AJun 30, 1981
System for enhanced light uniformity in a document scanning system
IBM4 citations60