Inventor
KOS ROBERT D
MN11 patents
Patents
11 patentsUS5154301AOct 13, 1992
Wafer carrier
FLUOROWARE INC505 citations98
US4949848AAug 21, 1990
Wafer carrier
FLUOROWARE INC533 citations98
US5255797AOct 26, 1993
Wafer carrier with wafer retaining cushions
FLUOROWARE INC73 citations95
US5111936AMay 12, 1992
Wafer carrier
FLUOROWARE INC77 citations95
US5207324AMay 4, 1993
Wafer cushion for shippers
FLUOROWARE INC56 citations92
US4880116ANov 14, 1989
Robotic accessible wafer shipper assembly
FLUOROWARE INC41 citations92
US4817795AApr 4, 1989
Robotic accessible wafer shipper assembly
FLUOROWARE INC39 citations92
US5248033ASep 28, 1993
Hinged tilt box with inclined portion
FLUOROWARE INC32 citations91
US5123681AJun 23, 1992
Latch for wafer storage box for manual or robot operation
FLUOROWARE INC33 citations91
US6164530ADec 26, 2000
Disk carrier with transponder
FLUOROWARE INC24 citations89
US5270482ADec 14, 1993
Wafer carrier process platform
FLUOROWARE INC5 citations62