Inventor
DIRECKS DANIEL JOZEF MARIA
NL17 patents
⚠️ This page may combine multiple inventors who share the name “DIRECKS DANIEL JOZEF MARIA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
7 patentsUS8351018B2Jan 8, 2013
Fluid handling structure, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV22 citations91
US8345218B2Jan 1, 2013
Immersion lithographic apparatus, drying device, immersion metrology apparatus and device manufacturing method
ASML NETHERLANDS BV14 citations83
US7561250B2Jul 14, 2009
Lithographic apparatus having parts with a coated film adhered thereto
ASML NETHERLANDS BV9 citations82
US11143968B2Oct 12, 2021
Fluid handling structure, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations61
US11982947B2May 14, 2024
Contamination trap
ASML NETHERLANDS BV0 citations56
US11556067B2Jan 17, 2023
Contamination trap
ASML NETHERLANDS BV1 citations56
US12411424B2Sep 9, 2025
Temperature conditioning system, a lithographic apparatus and a method of temperature conditioning an object
ASML NETHERLANDS BV0 citations44
DIRECKS DANIEL JOZEF MARIA
4 patentsUS8259283B2Sep 4, 2012
Immersion lithographic apparatus and device manufacturing method
DIRECKS DANIEL JOZEF MARIA10 citations81
US8421993B2Apr 16, 2013
Fluid handling structure, lithographic apparatus and device manufacturing method
DIRECKS DANIEL JOZEF MARIA14 citations80
US9383654B2Jul 5, 2016
Fluid handling structure, lithographic apparatus and device manufacturing method
DIRECKS DANIEL JOZEF MARIA0 citations49
US9618835B2Apr 11, 2017
Lithographic apparatus and a device manufacturing method involving an elongate liquid supply opening or an elongate region of relatively high pressure
DIRECKS DANIEL JOZEF MARIA0 citations39