Inventor
PHILIPS DANNY MARIA HUBERTUS
NL15 patents
⚠️ This page may combine multiple inventors who share the name “PHILIPS DANNY MARIA HUBERTUS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
5 patentsUS8351018B2Jan 8, 2013
Fluid handling structure, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV22 citations91
US8345218B2Jan 1, 2013
Immersion lithographic apparatus, drying device, immersion metrology apparatus and device manufacturing method
ASML NETHERLANDS BV14 citations83
US11143968B2Oct 12, 2021
Fluid handling structure, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations61
US10649341B2May 12, 2020
Lithographic apparatus
ASML NETHERLANDS BV0 citations50
US9465302B2Oct 11, 2016
Lithographic apparatus
ASML NETHERLANDS BV0 citations50
DIRECKS DANIEL JOZEF MARIA
3 patentsUS8259283B2Sep 4, 2012
Immersion lithographic apparatus and device manufacturing method
DIRECKS DANIEL JOZEF MARIA10 citations81
US8421993B2Apr 16, 2013
Fluid handling structure, lithographic apparatus and device manufacturing method
DIRECKS DANIEL JOZEF MARIA14 citations80
US9383654B2Jul 5, 2016
Fluid handling structure, lithographic apparatus and device manufacturing method
DIRECKS DANIEL JOZEF MARIA0 citations49