Inventor
VAN DEN DUNGEN CLEMENS JOHANNES GERARDUS
NL10 patents
⚠️ This page may combine multiple inventors who share the name “VAN DEN DUNGEN CLEMENS JOHANNES GERARDUS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
4 patentsUS8351018B2Jan 8, 2013
Fluid handling structure, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV22 citations91
US11143968B2Oct 12, 2021
Fluid handling structure, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations61
US10649341B2May 12, 2020
Lithographic apparatus
ASML NETHERLANDS BV0 citations50
US9465302B2Oct 11, 2016
Lithographic apparatus
ASML NETHERLANDS BV0 citations50
DIRECKS DANIEL JOZEF MARIA
3 patentsUS8421993B2Apr 16, 2013
Fluid handling structure, lithographic apparatus and device manufacturing method
DIRECKS DANIEL JOZEF MARIA14 citations80
US9383654B2Jul 5, 2016
Fluid handling structure, lithographic apparatus and device manufacturing method
DIRECKS DANIEL JOZEF MARIA0 citations49
US9618835B2Apr 11, 2017
Lithographic apparatus and a device manufacturing method involving an elongate liquid supply opening or an elongate region of relatively high pressure
DIRECKS DANIEL JOZEF MARIA0 citations39