Inventor
VAN PUTTEN ARNOLD JAN
NL4 patents
⚠️ This page may combine multiple inventors who share the name “VAN PUTTEN ARNOLD JAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
3 patentsUS8351018B2Jan 8, 2013
Fluid handling structure, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV22 citations91
US8345218B2Jan 1, 2013
Immersion lithographic apparatus, drying device, immersion metrology apparatus and device manufacturing method
ASML NETHERLANDS BV14 citations83
US9513566B2Dec 6, 2016
Lithographic apparatus
ASML NETHERLANDS BV6 citations67