Inventor
YANG CHUEN HUEI
TW12 patents
⚠️ This page may combine multiple inventors who share the name “YANG CHUEN HUEI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
UNITED MICROELECTRONICS CORP
8 patentsUS7913196B2Mar 22, 2011
Method of verifying a layout pattern
UNITED MICROELECTRONICS CORP3 citations61
US7669153B2Feb 23, 2010
Method for correcting photomask pattern
UNITED MICROELECTRONICS CORP5 citations61
US7664614B2Feb 16, 2010
Method of inspecting photomask defect
UNITED MICROELECTRONICS CORP3 citations59
US7312020B2Dec 25, 2007
Lithography method
UNITED MICROELECTRONICS CORP6 citations58
US7008732B2Mar 7, 2006
Photomask pattern
UNITED MICROELECTRONICS CORP2 citations58
US8042069B2Oct 18, 2011
Method for selectively amending layout patterns
UNITED MICROELECTRONICS CORP3 citations57
US7687206B2Mar 30, 2010
Mask pattern and method for forming the same
UNITED MICROELECTRONICS CORP0 citations48
US7141337B2Nov 28, 2006
Phase shift mask
UNITED MICROELECTRONICS CORP1 citations48