Inventor

WILLIAMS NORMAN

US12 patents

⚠️ This page may combine multiple inventors who share the name “WILLIAMS NORMAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LAM RES CORP

4 patents

US6174450B1Jan 16, 2001

Methods and apparatus for controlling ion energy and plasma density in a plasma processing system

LAM RES CORP400 citations98

US5614026AMar 25, 1997

Showerhead for uniform distribution of process gas

LAM RES CORP196 citations98

US5889252AMar 30, 1999

Method of and apparatus for independently controlling electric parameters of an impedance matching network

LAM RES CORP184 citations94

US7190119B2Mar 13, 2007

Methods and apparatus for optimizing a substrate in a plasma processing system

LAM RES CORP22 citations91

SEMATECH INC

2 patents

US5472561ADec 5, 1995

Radio frequency monitor for semiconductor process control

SEMATECH INC136 citations96

US5467013ANov 14, 1995

Radio frequency monitor for semiconductor process control

SEMATECH INC134 citations96

SUNBEAR TECHNOLOGIES LLC

1 patent

US6700054B2Mar 2, 2004

Solar collector for solar energy systems

SUNBEAR TECHNOLOGIES LLC157 citations92

VEECO INSTR INC

1 patent

US4354111AOct 12, 1982

Screen lens array system

VEECO INSTR INC26 citations81

WESTERN ELECTRIC CO

1 patent

US4139772AFeb 13, 1979

Plasma discharge ion source

WESTERN ELECTRIC CO7 citations73

LONG MAOLIN

1 patent

US8736175B2May 27, 2014

Current control in plasma processing systems

LONG MAOLIN4 citations72

WILLIAMS NORMAN

1 patent

US8433761B2Apr 30, 2013

Method for receiving and displaying segments of a message before the message is complete

WILLIAMS NORMAN4 citations57

CHOI BRIAN

1 patent

US8650002B2Feb 11, 2014

Determining plasma processing system readiness without generating plasma

CHOI BRIAN3 citations54