Inventor
TAN WAYNE
TW6 patents
Patents
6 patentsUS6200904B1Mar 13, 2001
Method of forming a contact hole of a DRAM
UNITED MICROELECTRONICS CORP12 citations72
US6140168AOct 31, 2000
Method of fabricating self-aligned contact window
UNITED MICROELECTRONICS CORP15 citations72
US6331471B1Dec 18, 2001
Method for improving peeling issues during fabrication of integrated circuits
UNITED MICROELECTRONICS CORP4 citations61
US6218243B1Apr 17, 2001
Method of fabricating a DRAM capacitor
UNITED MICROELECTRONICS CORP2 citations61
US6150278ANov 21, 2000
Method of fabricating node capacitor for DRAM processes
UNITED MICROELECTRONICS CORP4 citations61
US6136642AOct 24, 2000
Method of making a dynamic random access memory
UNITED MICROELECTRONICS CORP4 citations61