Inventor
KUWAJIMA TETSUYA
JP6 patents
Patents
6 patentsUS5529955AJun 25, 1996
Wiring forming method
YAMAHA CORP37 citations91
US5534461AJul 9, 1996
Method for manufacturing a semiconductor device having planarized wiring
YAMAHA CORP23 citations90
US6150720ANov 21, 2000
Semiconductor device having manufacturing wiring structure with buried plugs
YAMAHA CORP12 citations72
US6146998ANov 14, 2000
Method of manufacturing wiring structure having buried plugs in semiconductor device, and semiconductor device
YAMAHA CORP13 citations72
US5776827AJul 7, 1998
Wiring-forming method
YAMAHA CORP7 citations72
US5679981AOct 21, 1997
Semiconductor device having planarized wiring
YAMAHA CORP13 citations71