Inventor
WU SHU-LI
TW3 patents
Patents
3 patentsUS6380068B2Apr 30, 2002
Method for planarizing a flash memory device
MACRONIX INT CO LTD195 citations96
US6335274B1Jan 1, 2002
Method for forming a high-RI oxide film to reduce fluorine diffusion in HDP FSG process
MACRONIX INT CO LTD12 citations71
US6706596B2Mar 16, 2004
Method for forming flash memory cell
MACRONIX INT CO LTD3 citations60