Inventor

MKRTCHYAN MASIS

US6 patents

⚠️ This page may combine multiple inventors who share the name “MKRTCHYAN MASIS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

AGERE SYSTEMS INC

3 patents

US6576529B1Jun 10, 2003

Method of forming an alignment feature in or on a multilayered semiconductor structure

AGERE SYSTEMS INC14 citations91

US6977128B2Dec 20, 2005

Multi-layered semiconductor structure

AGERE SYSTEMS INC9 citations72

US6706609B2Mar 16, 2004

Method of forming an alignment feature in or on a multi-layered semiconductor structure

AGERE SYSTEMS INC4 citations61

LUCENT TECHNOLOGIES INC

3 patents

US5824441AOct 20, 1998

Lithographic process for device fabrication utilizing back-scattered electron beam signal intensity for alignment

LUCENT TECHNOLOGIES INC22 citations90

US6528799B1Mar 4, 2003

Device and method for suppressing space charge induced aberrations in charged-particle projection lithography systems

LUCENT TECHNOLOGIES INC18 citations82

US6015644AJan 18, 2000

Process for device fabrication using a variable transmission aperture

LUCENT TECHNOLOGIES INC16 citations76