P

Inventor

YAMAGUCHI HIDETO

JP31 patents
⚠️ This page may combine multiple inventors who share the name “YAMAGUCHI HIDETO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HITACHI INT ELECTRIC INC

12 patents
US6746908B2Jun 8, 2004

Temperature controlling method, thermal treating apparatus, and method of manufacturing semiconductor device

HITACHI INT ELECTRIC INC24 citations92
USD790490SJun 27, 2017

Reaction tube

HITACHI INT ELECTRIC INC6 citations83
USD780606SMar 7, 2017

Protector tube for thermocouple

HITACHI INT ELECTRIC INC4 citations67
US8380360B2Feb 19, 2013

Temperature control method, method of obtaining a temperature correction value, method of manufacturing a semiconductor device and substrate treatment apparatus

HITACHI INT ELECTRIC INC3 citations63
US10475652B2Nov 12, 2019

Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium

HITACHI INT ELECTRIC INC1 citations62
US10228291B2Mar 12, 2019

Substrate processing apparatus, and thermocouple

HITACHI INT ELECTRIC INC1 citations62
US10418293B2Sep 17, 2019

Substrate processing apparatus, method of manufacturing semiconductor device, and thermocouple support

HITACHI INT ELECTRIC INC0 citations52
US9269638B2Feb 23, 2016

Temperature detecting apparatus, substrate processing apparatus and method of manufacturing semiconductor device

HITACHI INT ELECTRIC INC0 citations52
US10684174B2Jun 16, 2020

Substrate processing apparatus, and thermocouple

HITACHI INT ELECTRIC INC0 citations51
USD786951SMay 16, 2017

Reaction tube

HITACHI INT ELECTRIC INC0 citations51
USD778741SFeb 14, 2017

Protector tube for thermocouple

HITACHI INT ELECTRIC INC1 citations51
USD778742SFeb 14, 2017

Protector tube for thermocouple

HITACHI INT ELECTRIC INC0 citations51

KOKUSAI ELECTRIC CORP

5 patents

MATSUSHITA ELECTRIC INDUSTRIAL CO LTD

4 patents

KOKUSAI ELECTRIC CO LTD

3 patents

JFE STEEL CORP

3 patents

HIROSE ELECTRIC CO LTD

1 patent

SUGIURA SHINOBU

1 patent

KOSUGI TETSUYA

1 patent

YAMAGUCHI HIDETO

1 patent