Inventor
KAVALDJIEV DANIEL IVANOV
US9 patents
⚠️ This page may combine multiple inventors who share the name “KAVALDJIEV DANIEL IVANOV”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR CORP
7 patentsUS7009696B2Mar 7, 2006
Method and apparatus for scanning, stitching, and damping measurements of a double-sided metrology inspection tool
KLA TENCOR CORP19 citations92
US7057741B1Jun 6, 2006
Reduced coherence symmetric grazing incidence differential interferometer
KLA TENCOR CORP31 citations91
US6686996B2Feb 3, 2004
Method and apparatus for scanning, stitching, and damping measurements of a double-sided metrology inspection tool
KLA TENCOR CORP7 citations73
US10739276B2Aug 11, 2020
Minimizing filed size to reduce unwanted stray light
KLA TENCOR CORP4 citations71
US7436506B2Oct 14, 2008
Method and apparatus for scanning, stitching, and damping measurements of a double-sided metrology inspection tool
KLA TENCOR CORP1 citations62
US9273952B2Mar 1, 2016
Grazing and normal incidence interferometer having common reference surface
KLA TENCOR CORP1 citations61
US9086389B2Jul 21, 2015
Sample inspection system detector
KLA TENCOR CORP0 citations41