Inventor

TSAI PO-FENG

TW21 patents

⚠️ This page may combine multiple inventors who share the name “TSAI PO-FENG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TSAI PO-FENG

TSAI PO-FENG

System and method for implementing a virtual metrology advanced process control platform

Adaptive and automatic determination of system parameters

Method and apparatus for advanced process control

Method and system for implementing virtual metrology in semiconductor fabrication

Integrated circuit manufacturing tool condition monitoring system and method

Processing exception handling

APC model extension using existing APC models

TAIWAN SEMICONDUCTOR MFG CO LTD

Method for ion implantation that adjusts a target&#39;s tilt angle based on a distribution of ejected ions from a target

Systems and associated methods for tuning processing tools

System and method for controlling ion implanter

Method for monitoring transport vehicle and maintenance thereof

Method for an ion implantation process employing an ion-collecting device that collects a distribution of ejected ions from a target to correct a tilt angle of the target

Method for ion implantation that adjusts a targets tilt angle based on a distribution of ejected ions from a target

TSEN ANDY

System and method for implementing a wafer acceptance test (“WAT”) advanced process control (“APC”) with novel sampling policy and architecture

System and method for implementing multi-resolution advanced process control

TAIWAN SEMICONDUCTOR MFG

System and method for implementing multi-resolution advanced process control

Adaptive and automatic determination of system parameters

UNIV TSINGHUA

Process controlling method with merged two-control loops

HO CHIA-TONG

Qualitative fault detection and classification system for tool condition monitoring and associated methods

CHEN JUI-LONG

System and method for data mining and feature tracking for fab-wide prediction and control

TSAI PO FENG

Method and system for tool condition monitoring based on a simulated inline measurement

Method for ion implantation that adjusts a target's tilt angle based on a distribution of ejected ions from a target