Inventor

SUNG JIN-NING

TW7 patents

⚠️ This page may combine multiple inventors who share the name “SUNG JIN-NING”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TSAI PO-FENG

2 patents

US8437870B2May 7, 2013

System and method for implementing a virtual metrology advanced process control platform

TSAI PO-FENG31 citations90

US8549012B2Oct 1, 2013

Processing exception handling

TSAI PO-FENG1 citations51

HUI KEUNG

1 patent

US9102033B2Aug 11, 2015

Apparatus and method for target thickness and surface profile uniformity control of multi-head chemical mechanical polishing process

HUI KEUNG11 citations80

TSEN ANDY

1 patent

US8394719B2Mar 12, 2013

System and method for implementing multi-resolution advanced process control

TSEN ANDY9 citations80

TAIWAN SEMICONDUCTOR MFG CO LTD

1 patent

US10096482B2Oct 9, 2018

Apparatus and method for chemical mechanical polishing process control

TAIWAN SEMICONDUCTOR MFG CO LTD3 citations71

TAIWAN SEMICONDUCTOR MFG

1 patent

US7951615B2May 31, 2011

System and method for implementing multi-resolution advanced process control

TAIWAN SEMICONDUCTOR MFG2 citations61

HSU CHIH-WEI

1 patent

US9477219B2Oct 25, 2016

Dynamic compensation in advanced process control

HSU CHIH-WEI0 citations40