Inventor
NAGAMATSU TATSUYA
JP4 patents
Patents
4 patentsUS10236192B2Mar 19, 2019
Liquid processing apparatus, liquid processing method, and storage medium
TOKYO ELECTRON LTD5 citations68
US9192878B2Nov 24, 2015
Liquid processing apparatus
TOKYO ELECTRON LTD5 citations68
US9321085B2Apr 26, 2016
Substrate processing method, storage medium storing computer program for implementing substrate processing method and substrate processing apparatus
TOKYO ELECTRON LTD0 citations49
US9862007B2Jan 9, 2018
Substrate liquid processing apparatus and method, and computer-readable recording medium with substrate liquid processing program recorded therein
TOKYO ELECTRON LTD0 citations38