Inventor
MATSUKI KATSUFUMI
JP2 patents
Patents
2 patentsUS10037901B2Jul 31, 2018
Substrate liquid treatment apparatus, method of cleaning substrate liquid treatment apparatus and non-transitory storage medium
TOKYO ELECTRON LTD5 citations71
US9321085B2Apr 26, 2016
Substrate processing method, storage medium storing computer program for implementing substrate processing method and substrate processing apparatus
TOKYO ELECTRON LTD0 citations49