Inventor
KODAMA TOSHIO
JP6 patents
⚠️ This page may combine multiple inventors who share the name “KODAMA TOSHIO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SII NANOTECHNOLOGY INC
3 patentsUS6838685B1Jan 4, 2005
Ion beam apparatus, ion beam processing method and sample holder member
SII NANOTECHNOLOGY INC26 citations91
US7297944B2Nov 20, 2007
Ion beam device and ion beam processing method, and holder member
SII NANOTECHNOLOGY INC9 citations70
US7276691B2Oct 2, 2007
Ion beam device and ion beam processing method
SII NANOTECHNOLOGY INC6 citations61