Inventor

HIRAO TAKESHI

JP6 patents

⚠️ This page may combine multiple inventors who share the name “HIRAO TAKESHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

2 patents

US7891365B2Feb 22, 2011

Nozzle cleaning apparatus, nozzle cleaning method, and a computer-readable storage medium storing nozzle cleaning program

TOKYO ELECTRON LTD8 citations80

US7326299B2Feb 5, 2008

Process liquid supply nozzle, process liquid supply device and nozzle cleaning method

TOKYO ELECTRON LTD4 citations59

KOMETANI YASUYUKI

2 patents

US8216390B2Jul 10, 2012

Cleaning and drying-preventing method, and cleaning and drying-preventing apparatus

KOMETANI YASUYUKI3 citations55

US8512478B2Aug 20, 2013

Cleaning and drying-preventing method, and cleaning and drying-preventing apparatus

KOMETANI YASUYUKI0 citations45

HITACHI LTD

1 patent

US11349494B2May 31, 2022

Data compression apparatus and data compression method

HITACHI LTD0 citations60

HIRAO TAKESHI

1 patent

US8562753B2Oct 22, 2013

Nozzle cleaning method and a computer-readable storage medium storing nozzle cleaning program

HIRAO TAKESHI0 citations42