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Inventor

EATON STEVEN G

US12 patents
⚠️ This page may combine multiple inventors who share the name “EATON STEVEN G”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KLA TENCOR CORP

6 patents
US5948972ASep 7, 1999

Dual stage instrument for scanning a specimen

KLA TENCOR CORP129 citations98
US6267005B1Jul 31, 2001

Dual stage instrument for scanning a specimen

KLA TENCOR CORP119 citations97
US7100430B2Sep 5, 2006

Dual stage instrument for scanning a specimen

KLA TENCOR CORP27 citations91
US6520005B2Feb 18, 2003

System for sensing a sample

KLA TENCOR CORP19 citations91
US7278301B2Oct 9, 2007

System for sensing a sample

KLA TENCOR CORP2 citations61
US6931917B2Aug 23, 2005

System for sensing a sample

KLA TENCOR CORP1 citations61

VARIAN ASSOCIATES

3 patents
US4613981ASep 23, 1986

Method and apparatus for lithographic rotate and repeat processing

VARIAN ASSOCIATES21 citations81
US4592081AMay 27, 1986

Adaptive X-ray lithography mask

VARIAN ASSOCIATES22 citations80
US4607213AAug 19, 1986

Shielded capacitive mask aligner

VARIAN ASSOCIATES7 citations73

HEWLETT PACKARD CO

2 patents
US4939694AJul 3, 1990

Defect tolerant self-testing self-repairing memory system

HEWLETT PACKARD CO215 citations97
US4782481ANov 1, 1988

Apparatus and method for transferring information

HEWLETT PACKARD CO21 citations81

TENCOR INSTRUMENTS

1 patent
US5705741AJan 6, 1998

Constant-force profilometer with stylus-stabilizing sensor assembly, dual-view optics, and temperature drift compensation

TENCOR INSTRUMENTS71 citations96