Inventor
GAST TRACY A
US12 patents
⚠️ This page may combine multiple inventors who share the name “GAST TRACY A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
FSI INT INC
6 patentsUS7913706B2Mar 29, 2011
Rinsing methodologies for barrier plate and venturi containment systems in tools used to process microelectronic workpieces with one or more treatment fluids, and related apparatuses
FSI INT INC14 citations82
US7244315B2Jul 17, 2007
Microelectronic device drying devices and techniques
FSI INT INC9 citations71
US6845779B2Jan 25, 2005
Edge gripping device for handling a set of semiconductor wafers in an immersion processing system
FSI INT INC7 citations70
US8978675B2Mar 17, 2015
Method and apparatus for treating a workpiece with arrays of nozzles
FSI INT INC0 citations50
US8967167B2Mar 3, 2015
Barrier structure and nozzle device for use in tools used to process microelectronic workpieces with one or more treatment fluids
FSI INT INC0 citations50
US8668778B2Mar 11, 2014
Method of removing liquid from a barrier structure
FSI INT INC0 citations50
LAUERHAAS JEFFREY M
2 patentsUS8235062B2Aug 7, 2012
Tools and methods for processing microelectronic workpieces using process chamber designs that easily transition between open and closed modes of operation
LAUERHAAS JEFFREY M18 citations89
US8684015B2Apr 1, 2014
Tools and methods for processing microelectronic workpieces using process chamber designs that easily transition between open and closed modes of operation
LAUERHAAS JEFFREY M4 citations70
TEL FSI INC
2 patentsUS9666456B2May 30, 2017
Method and apparatus for treating a workpiece with arrays of nozzles
TEL FSI INC2 citations71
US9039840B2May 26, 2015
Tools and methods for processing microelectronic workpieces using process chamber designs that easily transition between open and closed modes of operation
TEL FSI INC0 citations51