Inventor
ROSE ALAN D
US17 patents
⚠️ This page may combine multiple inventors who share the name “ROSE ALAN D”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
FSI INT INC
5 patentsUS7681581B2Mar 23, 2010
Compact duct system incorporating moveable and nestable baffles for use in tools used to process microelectronic workpieces with one or more treatment fluids
FSI INT INC14 citations85
US7913706B2Mar 29, 2011
Rinsing methodologies for barrier plate and venturi containment systems in tools used to process microelectronic workpieces with one or more treatment fluids, and related apparatuses
FSI INT INC14 citations82
US8978675B2Mar 17, 2015
Method and apparatus for treating a workpiece with arrays of nozzles
FSI INT INC0 citations50
US8967167B2Mar 3, 2015
Barrier structure and nozzle device for use in tools used to process microelectronic workpieces with one or more treatment fluids
FSI INT INC0 citations50
US8668778B2Mar 11, 2014
Method of removing liquid from a barrier structure
FSI INT INC0 citations50
COLLINS JIMMY D
4 patentsUS8387635B2Mar 5, 2013
Barrier structure and nozzle device for use in tools used to process microelectronic workpieces with one or more treatment fluids
COLLINS JIMMY D18 citations90
US8544483B2Oct 1, 2013
Barrier structure and nozzle device for use in tools used to process microelectronic workpieces with one or more treatment fluids
COLLINS JIMMY D4 citations70
US8899248B2Dec 2, 2014
Barrier structure and nozzle device for use in tools used to process microelectronic workpieces with one or more treatment fluids
COLLINS JIMMY D3 citations59
US8656936B2Feb 25, 2014
Barrier structure and nozzle device for use in tools used to process microelectronic workpieces with one or more treatment fluids
COLLINS JIMMY D3 citations59
TEXAS INSTRUMENTS INC
3 patentsUS5423942AJun 13, 1995
Method and apparatus for reducing etching erosion in a plasma containment tube
TEXAS INSTRUMENTS INC493 citations98
US4792378ADec 20, 1988
Gas dispersion disk for use in plasma enhanced chemical vapor deposition reactor
TEXAS INSTRUMENTS INC354 citations96
US4820371AApr 11, 1989
Apertured ring for exhausting plasma reactor gases
TEXAS INSTRUMENTS INC84 citations95
TEL FSI INC
3 patentsUS9564378B2Feb 7, 2017
Detection of lost wafer from spinning chuck
TEL FSI INC7 citations81
US9666456B2May 30, 2017
Method and apparatus for treating a workpiece with arrays of nozzles
TEL FSI INC2 citations71
US9039840B2May 26, 2015
Tools and methods for processing microelectronic workpieces using process chamber designs that easily transition between open and closed modes of operation
TEL FSI INC0 citations51
LAUERHAAS JEFFREY M
2 patentsUS8235062B2Aug 7, 2012
Tools and methods for processing microelectronic workpieces using process chamber designs that easily transition between open and closed modes of operation
LAUERHAAS JEFFREY M18 citations89
US8684015B2Apr 1, 2014
Tools and methods for processing microelectronic workpieces using process chamber designs that easily transition between open and closed modes of operation
LAUERHAAS JEFFREY M4 citations70