Inventor
MUMOLA PETER B
US11 patents
⚠️ This page may combine multiple inventors who share the name “MUMOLA PETER B”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HUGHES AIRCRAFT CO
6 patentsUS5229872AJul 20, 1993
Exposure device including an electrically aligned electronic mask for micropatterning
HUGHES AIRCRAFT CO1,335 citations98
US5337150AAug 9, 1994
Apparatus and method for performing thin film layer thickness metrology using a correlation reflectometer
HUGHES AIRCRAFT CO57 citations95
US5419803AMay 30, 1995
Method of planarizing microstructures
HUGHES AIRCRAFT CO35 citations92
US5292400AMar 8, 1994
Method and apparatus for producing variable spatial frequency control in plasma assisted chemical etching
HUGHES AIRCRAFT CO38 citations92
US5474647ADec 12, 1995
Wafer flow architecture for production wafer processing
HUGHES AIRCRAFT CO35 citations89
US5365031ANov 15, 1994
Apparatus and method for shielding a workpiece holding mechanism from depreciative effects during workpiece processing
HUGHES AIRCRAFT CO15 citations73