Inventor
MATSUNAGA MINOBU
JP19 patents
⚠️ This page may combine multiple inventors who share the name “MATSUNAGA MINOBU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
DAINIPPON SCREEN MFG
17 patentsUS5963753AOct 5, 1999
Substrate processing apparatus
DAINIPPON SCREEN MFG103 citations97
US5927077AJul 27, 1999
Processing system hot plate construction substrate
DAINIPPON SCREEN MFG58 citations96
US6558053B2May 6, 2003
Substrate processing apparatus
DAINIPPON SCREEN MFG63 citations95
US6099643AAug 8, 2000
Apparatus for processing a substrate providing an efficient arrangement and atmospheric isolation of chemical treatment section
DAINIPPON SCREEN MFG61 citations95
US6869234B2Mar 22, 2005
Developing apparatus and developing method
DAINIPPON SCREEN MFG23 citations92
US6832863B2Dec 21, 2004
Substrate treating apparatus and method
DAINIPPON SCREEN MFG41 citations92
US6827782B2Dec 7, 2004
Chemical treating apparatus
DAINIPPON SCREEN MFG30 citations92
US5976620ANov 2, 1999
Coating solution applying method and apparatus
DAINIPPON SCREEN MFG26 citations92
US5857474AJan 12, 1999
Method of and apparatus for washing a substrate
DAINIPPON SCREEN MFG45 citations92
US5638687AJun 17, 1997
Substrate cooling method and apparatus
DAINIPPON SCREEN MFG40 citations92
US5522215AJun 4, 1996
Substrate cooling apparatus
DAINIPPON SCREEN MFG41 citations92
US6440218B1Aug 27, 2002
Coating solution applying method and apparatus
DAINIPPON SCREEN MFG38 citations91
US5984540ANov 16, 1999
Developing apparatus and developing method
DAINIPPON SCREEN MFG27 citations91
US6656277B2Dec 2, 2003
Apparatus for and method of processing substrate
DAINIPPON SCREEN MFG18 citations84
US6752544B2Jun 22, 2004
Developing apparatus and developing method
DAINIPPON SCREEN MFG12 citations74
US7105074B2Sep 12, 2006
Substrate treating method and apparatus
DAINIPPON SCREEN MFG5 citations62
US5865893AFeb 2, 1999
Spin coating apparatus
DAINIPPON SCREEN MFG3 citations62