Inventor
FUKAMI TERUAKI
JP9 patents
Patents
9 patentsUS6120353ASep 19, 2000
Polishing method for semiconductor wafer and polishing pad used therein
SHINETSU HANDOTAI KK38 citations92
US5821167AOct 13, 1998
Method of manufacturing semiconductor mirror wafers
SHINETSU HANDOTAI KK24 citations92
US6306021B1Oct 23, 2001
Polishing pad, polishing method, and polishing machine for mirror-polishing semiconductor wafers
SHINETSU HANDOTAI KK31 citations91
US5891353AApr 6, 1999
Polishing agent used for polishing semiconductor wafers and polishing method using the same
SHINETSU HANDOTAI KK6 citations73
US5866226AFeb 2, 1999
Polishing agent used for polishing semiconductor wafers and polishing method using the same
SHINETSU HANDOTAI KK8 citations73
US5792258AAug 11, 1998
High-frequency induction heater and method of producing semiconductor single crystal using the same
SHINETSU HANDOTAI KK7 citations73
US6060396AMay 9, 2000
Polishing agent used for polishing semiconductor silicon wafers and polishing method using the same
SHINETSU HANDOTAI KK12 citations71
US6582280B1Jun 24, 2003
Sandblasting agent, wafer treated with the same, and method of treatment with the same
SHINETSU HANDOTAI KK8 citations69
US6884721B2Apr 26, 2005
Silicon wafer storage water and silicon wafer storage method
SHINETSU HANDOTAI KK3 citations61