Inventor
SRINIVASAN RADHIKA
US14 patents
⚠️ This page may combine multiple inventors who share the name “SRINIVASAN RADHIKA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SIEMENS AG
7 patentsUS5827765AOct 27, 1998
Buried-strap formation in a dram trench capacitor
SIEMENS AG81 citations96
US5656535AAug 12, 1997
Storage node process for deep trench-based DRAM
SIEMENS AG42 citations95
US6130145AOct 10, 2000
Insitu doped metal policide
SIEMENS AG50 citations92
US5893735AApr 13, 1999
Three-dimensional device layout with sub-groundrule features
SIEMENS AG34 citations92
US5844266ADec 1, 1998
Buried strap formation in a DRAM trench capacitor
SIEMENS AG32 citations92
US5792685AAug 11, 1998
Three-dimensional device layout having a trench capacitor
SIEMENS AG39 citations92
US6074903AJun 13, 2000
Method for forming electrical isolation for semiconductor devices
SIEMENS AG19 citations84
IBM
7 patentsUS6140208AOct 31, 2000
Shallow trench isolation (STI) with bilayer of oxide-nitride for VLSI applications
IBM72 citations95
US6153474ANov 28, 2000
Method of controllably forming a LOCOS oxide layer over a portion of a vertically extending sidewall of a trench extending into a semiconductor substrate
IBM28 citations92
US6190955B1Feb 20, 2001
Fabrication of trench capacitors using disposable hard mask
IBM25 citations91
US5923971AJul 13, 1999
Reliable low resistance strap for trench storage DRAM cell using selective epitaxy
IBM30 citations89
US6348394B1Feb 19, 2002
Method and device for array threshold voltage control by trapped charge in trench isolation
IBM7 citations73
US6797582B2Sep 28, 2004
Vertical thermal nitride mask (anti-collar) and processing thereof
IBM2 citations62
US6333531B1Dec 25, 2001
Dopant control of semiconductor devices
IBM2 citations59