Inventor

OTA MASAKATSU

JP3 patents

Patents

3 patents

US4799791AJan 24, 1989

Illuminance distribution measuring system

CANON KK30 citations91

US6795167B2Sep 21, 2004

Projection exposure apparatus and device manufacturing method using the same

CANON KK10 citations71

US6646717B2Nov 11, 2003

Projection exposure apparatus and device manufacturing method using the same

CANON KK2 citations60