Inventor
HAYAMA TAKUJI
JP10 patents
Patents
10 patentsUS6878044B2Apr 12, 2005
Polishing apparatus
EBARA CORP47 citations96
US6358128B1Mar 19, 2002
Polishing apparatus
EBARA CORP61 citations96
US7632378B2Dec 15, 2009
Polishing apparatus
EBARA CORP15 citations92
US6682408B2Jan 27, 2004
Polishing apparatus
EBARA CORP21 citations92
US6354922B1Mar 12, 2002
Polishing apparatus
EBARA CORP50 citations92
US7445543B2Nov 4, 2008
Polishing apparatus
EBARA CORP19 citations90
US6783427B2Aug 31, 2004
Polishing system with air exhaust system
EBARA CORP9 citations73
US7156719B2Jan 2, 2007
Polishing apparatus
EBARA CORP2 citations62
US7942725B2May 17, 2011
Polishing apparatus
EBARA CORP3 citations60
US7270594B2Sep 18, 2007
Polishing apparatus
EBARA CORP0 citations52