Inventor
HERSCHBEIN STEVEN B
US12 patents
⚠️ This page may combine multiple inventors who share the name “HERSCHBEIN STEVEN B”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
11 patentsUS7119333B2Oct 10, 2006
Ion detector for ion beam applications
IBM34 citations91
US6730237B2May 4, 2004
Focused ion beam process for removal of copper
IBM21 citations89
US7351966B1Apr 1, 2008
High-resolution optical channel for non-destructive navigation and processing of integrated circuits
IBM11 citations82
US6858530B2Feb 22, 2005
Method for electrically characterizing charge sensitive semiconductor devices
IBM12 citations82
US6670717B2Dec 30, 2003
Structure and method for charge sensitive electrical devices
IBM13 citations82
US6987067B2Jan 17, 2006
Semiconductor copper line cutting method
IBM7 citations69
US6900137B2May 31, 2005
Dry etch process to edit copper lines
IBM10 citations68
US7781733B2Aug 24, 2010
In-situ high-resolution light-optical channel for optical viewing and surface processing in parallel with charged particle (FIB and SEM) techniques
IBM2 citations61
US6946064B2Sep 20, 2005
Sample mount for performing sputter-deposition in a focused ion beam (FIB) tool
IBM3 citations60
US6843893B2Jan 18, 2005
Metal dry etch using electronic field
IBM0 citations51
US7867910B2Jan 11, 2011
Method of accessing semiconductor circuits from the backside using ion-beam and gas-etch
IBM0 citations46