Inventor
SCRUDATO CARMELO F
US3 patents
Patents
3 patentsUS7205237B2Apr 17, 2007
Apparatus and method for selected site backside unlayering of si, GaAs, GaxAlyAszof SOI technologies for scanning probe microscopy and atomic force probing characterization
IBM15 citations80
US6900137B2May 31, 2005
Dry etch process to edit copper lines
IBM10 citations68
US7867910B2Jan 11, 2011
Method of accessing semiconductor circuits from the backside using ion-beam and gas-etch
IBM0 citations46