Inventor

SALNIK ALEXEI

US2 patents

Patents

2 patents

US7660686B1Feb 9, 2010

Ion implant metrology system with fault detection and identification

KLA TENCOR CORP9 citations81

US7755752B1Jul 13, 2010

Combined modulated optical reflectance and photoreflectance system

KLA TENCOR CORP19 citations80