Inventor
CHELYUBEEV DMITRY
RU5 patents
Patents
5 patentsUS9310768B2Apr 12, 2016
Method for synthesis and formation of a digital hologram for use in microlithography
RAKHOVSKY VADIM10 citations77
US9952516B1Apr 24, 2018
System and method for generating a lithographic image with the use of a digital hologram and a reflective concave in curvilinear surface
RAKHOVSKY VADIM4 citations67
US10768531B1Sep 8, 2020
System and method of maskless lithography with the use of a curvilinear hologram
RAKHOVSKY VADIM0 citations46
US10162307B2Dec 25, 2018
System and method for generating a lithographic image with the use of a reflective concave curvilinear surface and a digital hologram in a diverging beam
RAKHOVSKY VADIM1 citations46
US9557711B2Jan 31, 2017
Method of static scaling of image in holographic lithography
RAKHOVSKY VADIM0 citations35