Inventor
PATTANAIK GYANARANJAN
US5 patents
Patents
5 patentsUS11024535B2Jun 1, 2021
Method for filling recessed features in semiconductor devices with a low-resistivity metal
TOKYO ELECTRON LTD4 citations71
US11621190B2Apr 4, 2023
Method for filling recessed features in semiconductor devices with a low-resistivity metal
TOKYO ELECTRON LTD0 citations61
US12482667B2Nov 25, 2025
Thermal etching of ruthenium
TOKYO ELECTRON LTD0 citations50
US12237216B2Feb 25, 2025
Method for filling recessed features in semiconductor devices with a low-resistivity metal
TOKYO ELECTRON LTD0 citations50
US11171060B2Nov 9, 2021
Dual metal contacts with ruthenium metal plugs for semiconductor devices
TOKYO ELECTRON LTD0 citations49