Inventor
WILBY TONY
GB5 patents
Patents
5 patentsUS11913109B2Feb 27, 2024
Apparatus and a method of controlling thickness variation in a material layer formed using physical vapour deposition
SPTS TECHNOLOGIES LTD1 citations57
US12492465B2Dec 9, 2025
PVD apparatus and method
SPTS TECHNOLOGIES LTD0 citations56
US12565698B2Mar 3, 2026
Method of operating a PVD apparatus
SPTS TECHNOLOGIES LTD0 citations47
US12207556B2Jan 21, 2025
Method of deposition
SPTS TECHNOLOGIES LTD0 citations47
US11361975B2Jun 14, 2022
Method of fabricating integrated circuits
SPTS TECHNOLOGIES LTD0 citations47