Inventor
MINODA KEN
JP16 patents
⚠️ This page may combine multiple inventors who share the name “MINODA KEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CANON KK
11 patentsUS9283720B2Mar 15, 2016
Position detection apparatus, imprint apparatus, and position detection method
CANON KK19 citations92
US8922786B2Dec 30, 2014
Detector, imprint apparatus, and article manufacturing method
CANON KK9 citations83
US10634995B2Apr 28, 2020
Position detector, position detection method, imprint apparatus, and product manufacturing method
CANON KK3 citations71
US8976370B2Mar 10, 2015
Measuring apparatus, imprint system, measuring method, and device manufacturing method
CANON KK3 citations62
US10416551B2Sep 17, 2019
Imprinting apparatus, imprinting method, and article manufacturing method
CANON KK1 citations60
US11169452B2Nov 9, 2021
Measurement apparatus, exposure apparatus, and method of manufacturing article
CANON KK0 citations51
US9645514B2May 9, 2017
Imprint apparatus, imprint method, and device manufacturing method
CANON KK0 citations51
US11426906B2Aug 30, 2022
Imprint apparatus, imprint method, and article manufacturing method
CANON KK0 citations50
US11187977B2Nov 30, 2021
Imprint apparatus, imprint method, and method of manufacturing article
CANON KK0 citations50
US9718234B2Aug 1, 2017
Imprint lithography apparatus and device manufacturing method therefor
CANON KK0 citations41
US7629563B2Dec 8, 2009
Methods for adjusting and evaluating light intensity distribution of illumination apparatus, illumination apparatus, exposure apparatus, and device manufacturing method
CANON KK0 citations40
MINODA KEN
4 patentsUS8842294B2Sep 23, 2014
Position detection apparatus, imprint apparatus, and position detection method
MINODA KEN25 citations91
US8672661B2Mar 18, 2014
Imprint apparatus and article manufacturing method
MINODA KEN7 citations82
US8854605B2Oct 7, 2014
Illumination optical system, exposure apparatus, and device fabrication method
MINODA KEN4 citations71
US8305560B2Nov 6, 2012
Exposure apparatus, device manufacturing method, and aperture stop manufacturing method
MINODA KEN2 citations60