Inventor
YORK RUDY L
US14 patents
Patents
14 patentsUS4837113AJun 6, 1989
Method for depositing compound from group II-VI
TEXAS INSTRUMENTS INC475 citations99
US4949671AAug 21, 1990
Processing apparatus and method
TEXAS INSTRUMENTS INC372 citations98
US5248636ASep 28, 1993
Processing method using both a remotely generated plasma and an in-situ plasma with UV irradiation
TEXAS INSTRUMENTS INC86 citations96
US5138973AAug 18, 1992
Wafer processing apparatus having independently controllable energy sources
TEXAS INSTRUMENTS INC108 citations96
US4877757AOct 31, 1989
Method of sequential cleaning and passivating a GaAs substrate using remote oxygen plasma
TEXAS INSTRUMENTS INC83 citations96
US5157000AOct 20, 1992
Method for dry etching openings in integrated circuit layers
TEXAS INSTRUMENTS INC72 citations95
US5384267AJan 24, 1995
Method of forming infrared detector by hydrogen plasma etching to form refractory metal interconnects
TEXAS INSTRUMENTS INC22 citations91
US5188970AFeb 23, 1993
Method for forming an infrared detector having a refractory metal
TEXAS INSTRUMENTS INC26 citations88
US4855160AAug 8, 1989
Method for passivating wafer
TEXAS INSTRUMENTS INC8 citations74
US4838984AJun 13, 1989
Method for etching films of mercury-cadmium-telluride and zinc sulfid
TEXAS INSTRUMENTS INC11 citations74
US5077092ADec 31, 1991
Method and apparatus for deposition of zinc sulfide films
TEXAS INSTRUMENTS INC9 citations73
US5017511AMay 21, 1991
Method for dry etching vias in integrated circuit layers
TEXAS INSTRUMENTS INC12 citations72
US4620209AOct 28, 1986
Mosaic pattern of infrared detectors of different cut off wave lengths
TEXAS INSTRUMENTS INC2 citations60
US5132761AJul 21, 1992
Method and apparatus for forming an infrared detector having a refractory metal
TEXAS INSTRUMENTS INC1 citations48